Feedthroughs and Hermetic Connectors for Semiconductor and Vacuum Equipment

Semiconductor & Vacuum Equipment: industry scene
Illustration

Semiconductor tools, vacuum furnaces and compressors must pass power and signals through chamber walls without leaks.

Our feedthrough studs carry 105 to 1000 A at 5000 VAC with leak rates below 1 × 10⁻⁸ Pa·m³/s; CT-M, ZH28 and K hermetic receptacles bring signal circuits through the wall.

What the connectors must handle

Leak rate

Below 1 × 10⁻⁸ Pa·m³/s at 0.1 MPa, every unit tested.

Current

105 A to 1000 A power studs; custom designs.

Signal

Glass-sealed multi-contact receptacles.

Temperature

Standard to +130 °C; custom to +170 °C; glass-sealed to +200 °C.

Recommended series

All series can be customized — contact counts, cable lengths, materials and finishes.

From sample to production

  1. Send your requirement

    Part number, drawing, pin-out or a short description of your application.

  2. Configuration and quote

    Our engineers match the configuration and reply with a drawing and quotation.

  3. Samples

    Samples are made to your order. Third-party testing to your specification is available on request.

  4. Your approval

    You test the samples in your own equipment and approve them.

  5. Series production

    Production follows the approved sample configuration.

Need a quote or a drawing?

Send your part number, pin-out or drawing. An engineer will reply by email.

Request a quote