Semiconductor tools
NPT, O-ring and custom power feedthroughs carry current through the sealed walls of semiconductor manufacturing equipment.
Feedthroughs and Hermetic Connectors for Semiconductor and Vacuum Equipment
Semiconductor tools, vacuum furnaces and compressors must pass power and signals through chamber walls without leaks.
Our feedthrough studs carry 105 to 1000 A at 5000 VAC with leak rates below 1 × 10⁻⁸ Pa·m³/s; CT-M, ZH28 and K hermetic receptacles bring signal circuits through the wall.
At a glance
- 1000 A
O-ring sealed feedthrough studs, standard range
- 5000 VAC
Withstanding voltage of NPT and O-ring studs
- < 1 × 10⁻⁸ Pa·m³/s
Leak rate of the standard studs at 0.1 MPa
- 3 to 61
Contacts in ZH28 and K hermetic receptacles
Where they are used
Vacuum furnaces and heat treatment
Standard and custom studs supply power through vacuum chamber walls; CT-M brings small signal circuits through vacuum and gas-filled equipment.
Pressure vessels and compressors
The feedthrough studs serve refrigeration and gas compressors and power distribution in pressure vessels.
What the connectors must handle
Leak rate
Standard NPT and O-ring studs leak less than 1 × 10⁻⁸ Pa·m³/s at 0.1 MPa differential.
Current
NPT studs carry 105–750 A and O-ring studs 105–1000 A, both withstanding 5000 VAC.
Pressure testing
Every standard stud is tested at 0.8 ± 0.05 MPa, and the design is type-tested at ≥ 8 MPa hydrostatic pressure.
Seals and temperature
O-ring studs use fluorosilicone for −40 to +130 °C or FKM for −20 to +130 °C; custom JXZ-37B and JXZ-43B flange-mounted feedthroughs run to +170 °C.
Signal feedthroughs
CT-M glass-sealed receptacles show no leakage at 152 kPa and run from −55 to +200 °C; ZH28 and K hermetic receptacles carry 3 to 61 contacts.
Mounting and tails
K receptacles use wire-wrap tails and K-F solder tails, with square-flange or jam-nut mounting; ZH28 mounts on a square flange.
Compare the series
Power feedthroughs
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| Series | Seal | Current | Withstanding voltage | Temperature | Leak rate or construction | Datasheet |
|---|---|---|---|---|---|---|
| NPT-sealed studs | NPT thread | 105–750 A | 5000 VAC | −40 to +130 °C | < 1 × 10⁻⁸ Pa·m³/s at 0.1 MPa | PDF, 163 KB |
| O-ring sealed studs | O-ring | 105–1000 A | 5000 VAC | −40 to +130 °C fluorosilicone / −20 to +130 °C FKM | < 1 × 10⁻⁸ Pa·m³/s at 0.1 MPa | PDF, 171 KB |
| Custom power feedthroughs | O-ring or flange | 450–750 A | 2400–5000 VAC | Up to +170 °C | Flange-mounted, crimp terminal (JXZ-37B / JXZ-43B) | PDF, 163 KB |
Hermetic signal receptacles
Swipe left or right to see all columns.
| Series | Sealing rating | Contacts | Current | Temperature | Rated voltage | Datasheet |
|---|---|---|---|---|---|---|
| CT-M | No leakage at 152 kPa | 2 to 5 | 7.5 A / 13 A | −55 to +200 °C | 250 V | PDF, 189 KB |
| ZH28 | Glass-sealed | 3 to 61 | 3–9 A (max. 6–18 A) | −60 to +155 °C (max. 200 °C) | 400–700 V | PDF, 212 KB |
| K | Leak-tested at 101 kPa | 3 to 61 | 7.5 A | −55 to +125 °C | 500 VAC | PDF, 208 KB |
How to choose
Separate power and signal
Use studs for high-current circuits and multi-contact hermetic receptacles for signals; give current and voltage for each.
Describe the wall and port
Give wall thickness, port thread and mounting space. NPT studs have a brass tapered-thread body; O-ring studs a stainless-steel body.
Set the leak test
Give the maximum leak rate, test gas, method and pressure differential, and whether every unit is tested.
Check temperature and insulation
Give the temperature range, vacuum level and media; the O-ring material sets the temperature range.
Send the interface
Send the mating model, drawing and pin-out, and we will review your project.
Recommended series
NPT-Sealed High-Current Feedthrough Studs, 105 to 750 A
105–750 A · 5000 VAC · leak < 1 × 10⁻⁸ Pa·m³/s
O-Ring Sealed High-Current Feedthrough Studs, up to 1000 A
105–1000 A · stainless steel · O-ring seal
Custom High-Current Power Feedthroughs
Designed to your vessel · 450–750 A examples · to +170 °C
CT-M Glass-Sealed Hermetic Receptacles, −55 to +200 °C
Glass-to-metal seal · 152 kPa leak-tight · −55 to +200 °C
ZH28 Glass-Sealed Hermetic Receptacles, 3 to 61 Contacts
Glass-sealed · 3 to 61 contacts · −60 to +155 °C
K Series Hermetic Receptacles (26482 Type)
26482 type · shells 8–24 · 3 to 61 contacts
All series can be customized — contact counts, cable lengths, materials and finishes.
Related guides
Selecting High-Current Power Feedthroughs for Vacuum and Pressure Vessels
How to choose a high-current power feedthrough: current and stud size, voltage, NPT vs O-ring sealing, leak rate, temperature and testing.
Hermetic Connector Leak Rates Explained
What a hermetic connector leak rate means, how Pa·m³/s converts to mbar·L/s and atm·cc/s, how leak rates are tested and how to specify one.
IP67, IP68 and Hermetic Sealing: What Connector Ratings Mean
What IP67 and IP68 mean for connectors, how they differ from hermetic sealing and underwater depth ratings, and what to put in your specification.
FAQ
How do the NPT and O-ring stud ranges differ?
NPT studs use a brass body with a tapered-thread seal and cover 105–750 A. O-ring studs use a stainless-steel body and cover 105–1000 A. Both withstand 5000 VAC and leak less than 1 × 10⁻⁸ Pa·m³/s at 0.1 MPa differential.
What leak rate do the feedthrough studs reach?
Less than 1 × 10⁻⁸ Pa·m³/s at 0.1 MPa differential for the standard NPT and O-ring studs, and every unit is pressure-tested at 0.8 ± 0.05 MPa.
Which feedthroughs handle +170 °C?
Custom JXZ-37B and JXZ-43B flange-mounted feedthroughs, rated 600 A and 450 A at 5000 VAC, from −40 to +170 °C.
Which hermetic receptacles suit small signal circuits?
CT-M carries 2 to 5 contacts with no leakage at 152 kPa, from −55 to +200 °C. ZH28 and K hermetic receptacles carry 3 to 61 contacts.
What should I send for a custom wall connection?
Send current, working voltage, temperature, pressure or vacuum level, wall thickness, port thread and the connection on both sides, plus a mounting drawing. For a multi-contact receptacle, add the pin-out and mating model.
From sample to production
Send your requirements
Part number, drawing, pin-out or a short description of your application.
Configuration and quote
Our engineers match the configuration and reply with a drawing and quotation.
Samples
Samples are built to order. The minimum order quantity is 10 pieces, and samples and production orders each take 4–8 weeks. Third-party testing to your specification is available on request.
Your approval
You test the samples in your own equipment and approve them.
Series production
Production follows the approved sample configuration, with machining, molding, plating and assembly in our own Shenyang factory.
Need a quote or a drawing?
Send your part number, pin-out or drawing. Every inquiry is acknowledged by email within 1 business day, and an engineer follows up with a matched configuration, drawing or quotation.